Substrate storage container
AssigneeMiraial Co., Ltd.
InventorSatoko Kai
Life of this patent
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AssigneeMiraial Co., Ltd.
InventorSatoko Kai
Estimating the term…
A back side substrate support portion 6 includes a lower side inclined face 622 on which an end of a back face of a substrate W slides, and a substrate support portion 632 that is located above the lower side inclined face 622 and can support an edge portion of the substrate W. When a container main body opening portion 21 is closed by a lid body 3, the edge portion of the substrate W slides on the lower side inclined face 622 and reaches the substrate support portion 632. At least a portion of the lower side inclined face 622 is configured from a second member that is different from a first member that configures the substrate support portion 632, and the second member has a lower maximum static friction coefficient and lower wear resistance than the first member.
A substrate storage container comprising:
Dependencies are inferred from the claim text.