Wafer processing system

A wafer processing system comprising:

• a transport vacuum chamber for handling a frame assembly under vacuum conditions;
• at least one vacuum cassette elevator load lock for housing a cassette and adjusting a vertical position of the cassette under vacuum conditions, wherein the at least one vacuum cassette elevator load lock is in vacuum communication with the transport vacuum chamber;
• and
• at least one wafer processing module in vacuum communication with the transport vacuum chamber;
• wherein the transport vacuum chamber comprises:
• an alignment device for adjusting a translational and rotational position of the frame assembly into alignment with a target position within the transport vacuum chamber;
• and
• a transfer robot disposed within the transport vacuum chamber for transferring the frame assembly between the at least one cassette vacuum chamber, the at least one alignment device, and the at least one wafer processing module under vacuum conditions;
• in which the alignment device comprises:
• a positioning assembly disposed within the transport vacuum chamber comprising a plurality of guide members that are arranged to define a frame assembly receiving area within the transport vacuum chamber;
• at least one support for supporting the frame assembly in the frame assembly receiving area;
• and
• an actuating assembly operable to change the plurality of guide members from an expanded configuration to a contracted configuration so as to reduce a first cross-sectional dimension of the frame assembly receiving area and to reduce a second cross-sectional dimension of the frame assembly receiving area that is perpendicular to the first cross-sectional dimension;
• wherein when the plurality of guide members change from the expanded configuration to the contracted configuration while the frame assembly is supported on the at least one support, the plurality of guide members engage with the frame assembly so as to adjust the translational and/or rotational position of the frame assembly into alignment with the target position.