Substrate liquid treatment apparatus

A substrate liquid treatment apparatus comprising:

• an inner tank configured to store a treatment liquid and having an upper opening;
• an outer tank disposed outside the inner tank;
• and
• a lid movable between a close position for closing the upper opening of the inner tank and an open position for opening the upper opening of the inner tank,
• wherein the lid includes:
• a main portion that covers the upper opening of the inner tank when the lid is positioned at the close position;
• and
• a splash shielding portion connected to the main portion so as to move integrally with the main portion, wherein
• when the lid is positioned at the close position, the splash shielding portion extends from a position higher than an upper end of a side wall of the inner tank adjacent to the splash shielding portion to a position which is lower than the upper end of the side wall and which is on the outer tank side of the side wall,
• the lid includes a first lid part that covers a first part of the upper opening of the inner tank and a second lid part that covers a second part of the upper opening of the inner tank, the first lid part and the second lid part are rotatable about respective rotation axes extending horizontally to move between the close position and the open position, and the first lid part and the second lid part each have the main portion and the splash shielding portion, and
• the lid includes a guide portion that is angled with respect to the splash shielding portion, the guide portion having a free end which is located outside of the outer tank when the lid is positioned at the open position, the guide portion is connected to the main portion such that the guide portion guides a liquid, which adheres to an upper surface of the main portion when the first lid part is in the close position, to a location outside of the outer tank by allowing the liquid to leave the guide portion from the free end, which becomes a lowermost end of the guide portion, when the first lid part is place in the open position.