Back to results
US 11,309,177 B2Granted
Apparatus and method for manufacturing a wafer
AssigneeSTMicroelectronics S.r.l.
InventorsRuggero Anzalone, Nicolo′ Frazzetto
Life of this patent
Estimating the term…
Abstract
Various embodiments provide an apparatus and method for fabricating a wafer, such as a SiC wafer. The apparatus includes a support having a plurality of arms for supporting a substrate. The arms allows for physical contact between the support and the substrate to be minimized. As a result, when the substrate is melted, surface tension between the arms and molten material is reduced, and the molten material will be less likely to cling to the support.
Claims17
An apparatus, comprising:
- a chamber;
- a receptacle in the chamber;
- a heater configured to heat the chamber;
- an input duct configured to introduce a gas into the chamber;
- an output duct configured to remove the gas from the chamber;
- and
- a support in the chamber and on the receptacle,
- the support including a frame, an opening in the frame, and a plurality of arms,
- each of the plurality of arms having a fixed end and a free end opposite to the fixed end,
- the fixed end being attached to the frame,
- the free end extending in to the opening and being suspended over the receptacle,
- each of the plurality of arms including a body portion and a raised portion,
- the body portion having a first end attached to the frame and a second end attached to the raised portion.
10 more elements
A support, comprising:
- a frame;
- an opening in the frame;
- and
- a plurality of arms extending in to the opening,
- each of the plurality of arms being cantilevered from the frame,
- each of the plurality of arms including a body portion coupled to the frame, and a raised portion coupled to the body portion,
- an upper surface of the body portion being coplanar with an upper surface of the frame,
- the raised portion being positioned at a portion of the arm that is furthest away from the frame.
5 more elements
A support, comprising:
- a frame;
- an opening in the frame;
- and
- a plurality of arms physically coupled to the frame,
- the plurality of arms extending from the frame and in to the opening,
- the plurality of arms including a first set of arms having a first length, and a second set of arms having a second length smaller than the first length,
- each of the plurality of arms including a body portion physically coupled to the frame, and a raised portion physically coupled to the body portion,
- the frame and the raised portion being on opposite sides of the body portion.
5 more elements
Dependencies are inferred from the claim text.