Vacuum processing apparatus and maintenance apparatus

A maintenance apparatus comprising:

• a case having an opening, wherein the case is configured to be attached to a processing chamber, wherein in an attached position of the case to the processing chamber the opening of the case faces a gate of the processing chamber, the gate having an adapter which selectively opens and closes the gate;
• an adapter detachment unit positioned inside the case, configured to remove the adapter from the gate to open the gate;
• an adapter detachment unit transfer mechanism positioned inside of the case, the adapter detachment unit mounted on the adapter detachment unit transfer mechanism, the adapter detachment unit transfer mechanism configured to move the adapter detachment unit to and stop at a detachment position adjacent the opening of the case, and wherein the adapter detachment unit removes the adapter from the gate at the detachment position;
• wherein the adapter detachment unit transfer mechanism is further configured to transfer the adapter detachment unit from the detachment position to a retracted position within the case and spaced from the detachment position with the adapter detachment unit holding the adapter within the case in the retracted position;
• at least one maintenance unit comprising at least one of (i) a detaching unit configured to detach a part from inside of the processing chamber, (ii) a cleaning unit configured to clean a portion within the processing chamber, or (iii) an attachment unit configured to attach a part within the processing chamber;
• a support table positioned inside the case;
• a maintenance unit transfer mechanism configured to pick up the at least one maintenance unit from the support table and to return the at least one maintenance unit to the support table, wherein the maintenance unit transfer mechanism is configured to extend through the opening of the case to move the at least one maintenance unit from the support table to outside of the case and into the processing chamber;
• wherein the at least one maintenance unit includes the cleaning unit, and
• a control unit configured to control the maintenance unit transfer mechanism to transfer the cleaning unit from inside of the case to outside of the case to clean the portion within the processing chamber after detachment of the part from the processing chamber and prior to attachment of the part in the processing chamber, and further configured to control the maintenance unit transfer mechanism to return the cleaning unit back inside the case after cleaning of the portion within the processing chamber.

A maintenance apparatus comprising:

• a case with an opening configured to be connected to a processing chamber;
• at least one maintenance unit;
• a maintenance unit transfer mechanism configured to transfer the at least one maintenance unit from inside of the case, through the opening and into the processing chamber;
• wherein the at least one maintenance unit includes a cleaning unit configured to clean a surface inside of the processing chamber,
• a support table inside of the case, wherein the cleaning unit is mounted on the support table and the maintenance unit transfer mechanism removes the cleaning unit from the support table to outside of the case and into the processing chamber to perform a cleaning operation, and thereafter returns the cleaning unit to the support table;
• and
• a control unit configured to control the maintenance unit transfer mechanism to transfer the cleaning unit from inside of the case to outside of the case to clean the surface within the processing chamber after detachment of a part from the processing chamber and prior to attachment of a replacement part in the processing chamber, and further configured to control the maintenance unit transfer mechanism to return the cleaning unit back inside the case after cleaning of the surface within the processing chamber.