Active gas generation apparatus and deposition processing apparatus

An active gas generation apparatus generating active gas by activating source gas supplied to a discharge space in which a dielectric barrier discharge is generated, said active gas generation apparatus comprising:

• an electrode unit including a first electrode and a second electrode;
• and
• an AC power source supplying an AC voltage to said electrode unit, wherein said electrode unit includes:
• an electrode body part made of a dielectric;
• said first electrode and said second electrode located within said electrode body part, and each having conductivity;
• a gas inlet located in said electrode body part, and receiving said source gas externally supplied;
• and
• a gas internal flow path located within said electrode body part, and allowing said source gas having entered through said gas inlet to pass therethrough, said gas internal flow path being spiral in plan view,
• said first electrode and said second electrode are arranged on sides of opposite side surfaces of said gas internal flow path to oppose each other with a portion of said electrode body part and said gas internal flow path therebetween, and are spiral in plan view along with said gas internal flow path, a region in said gas internal flow path between said first electrode and said second electrode being said discharge space, said dielectric barrier discharge being generated in said discharge space upon application of said AC voltage from said AC power source,
• said electrode unit further includes
• a plurality of gas ejection ports located below said discharge space to communicate with said gas internal flow path, and
• said active gas generated by activating said source gas supplied to said discharge space is jetted through said plurality of gas ejection ports.