Charged particle beam apparatus and adjustment method for charged particle beam apparatus

A charged particle beam apparatus comprising:

• a specimen chamber which is maintained at vacuum and in which a specimen is disposed;
• a preliminary exhaust chamber that is connected to the specimen chamber via a vacuum gate valve;
• an exhaust device that exhausts the preliminary exhaust chamber;
• a charged particle beam source;
• an optical system;
• a detector;
• a transporting device that transports the specimen from the preliminary exhaust chamber to the specimen chamber;
• and
• a control unit that controls the exhaust device, the optical system, the detector and the transporting device, wherein
• the control unit performs:
• adjustment processing in which at least one of the optical system and the detector is adjusted in a state where the specimen is housed in the preliminary exhaust chamber;
• and
• transporting processing which is performed after the adjustment processing and in which the vacuum gate valve is opened and the transporting device transports the specimen to the specimen chamber,
• wherein the control unit performs preliminary exhaust processing in which the exhaust device preliminarily exhausts the preliminary exhaust chamber, and
• the preliminary exhaust processing and the adjustment processing are performed in parallel, and
• wherein a charged particle beam emitted from the charged particle beam source is used in the adjustment processing.