Microwave assisted magnetic recording head slider and lapping method thereof

A lapping method of a microwave assisted magnetic recording (MAMR) head slider, adapted for polishing a predetermined surface of the MAMR head slider by a lapping plate with a lapping surface to form a MAMR head having a spin torque oscillator (STO) on the predetermined surface, and the lapping method comprising:

• a first lapping process:
• controlling the lapping plate to spin at a first speed, and controlling the MAMR head slider to move at a first moving speed, and applying a first force to the MAMR head slider so as to polish the predetermined surface;
• and
• a second lapping process:
• controlling the lapping plate to spin at a second speed that is lower than the first speed, and controlling the MAMR head slider to move at a second moving speed that is lower than the first moving speed, and applying a second force that is lower than the first force to the MAMR head slider so as to polish the predetermined surface;
• and the second lapping process comprising a final lapping process section, and the second force in the final lapping process being zero.