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US 11,308,606 B2Granted
Design-assisted inspection for DRAM and 3D NAND devices
AssigneeKLA Corporation
InventorsJunqing Huang, Hucheng Lee, Sangbong Park, Xiaochun Li
Life of this patent
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Abstract
With the disclosed systems and methods for DRAM and 3D NAND inspection, an image of the wafer is received based on the output for an inspection tool. Geometric measurements of a design of a plurality of memory devices on the wafer are received. A care area with higher inspection sensitivity is determined based on the geometric measurements.
Claims8
A system comprising:
- an inspection tool including:
- an energy source configured to generate energy that is directed to a wafer;
- and
- a detector configured to detect energy from the wafer and to generate output responsive to the energy that is detected;
- and
- a processor in electronic communication with the inspection tool, wherein the processor is configured to:
- receive an image of the wafer based on the output;
- receive geometric measurements of a design of a plurality of memory devices on the wafer, wherein the geometric measurements of the design are provided in design data of a device on the wafer, and wherein each of the memory devices is a DRAM cell;
- determine a care area with higher inspection sensitivity based on the geometric measurements;
- apply the care area to the memory devices;
- extend a job size in an X-direction to cover at least two array cells;
- determine a sub-swath that covers page breaks and identifies a cell boundary;
- and
- determine pattern-design alignment distortion and location of the cell boundary to another sub-swath without periphery intersections.
11 more elements
A method comprising:
- inspecting a wafer using an inspection tool;
- receiving, at a processor, an image of the wafer from the inspection tool;
- receiving, at the processor, geometric measurements of a design of a plurality of memory devices on the wafer, wherein the geometric measurements of the design are provided in design data of a device on the wafer, and wherein each of the memory devices is a DRAM cell;
- and
- determining, using the processor, a care area with higher inspection sensitivity based on the geometric measurements;
- applying the care area to the memory devices using the processor;
- extending a job size in an X-direction to cover at least two array cells using the processor;
- determining a sub-swath that covers page breaks and identifies a cell boundary using the processor;
- and
- determining pattern-design alignment distortion and location of the cell boundary to another sub-swath without periphery intersections using the processor.
7 more elements
Dependencies are inferred from the claim text.