Imaging device for in-line holographic imaging of an object
AssigneeImec Vzw
InventorsAbdulkadir Yurt, Richard Stahl, Murali Jayapala, Geert Vanmeerbeeck
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AssigneeImec Vzw
InventorsAbdulkadir Yurt, Richard Stahl, Murali Jayapala, Geert Vanmeerbeeck
Estimating the term…
Example embodiments relate to imaging devices for in-line holographic imaging of objects. One embodiment includes an imaging device for in-line holographic imaging of an object. The imaging device includes a set of light sources configured to output light in confined illumination cones. The imaging device also includes an image sensor that includes a set of light-detecting elements. The set of light sources are configured to output light such that the confined illumination cones are arranged side-by-side and illuminate a specific part of the object. The image sensor is arranged such that the light-detecting elements detect a plurality of interference patterns. Each interference pattern is formed by diffracted light from the object originating from a single light source and undiffracted light from the same single light source. At least a subset of the set of light-detecting elements is arranged to detect light relating to not more than one interference pattern.
An imaging device for in-line holographic imaging of an object, comprising:
A diagnostic equipment for analysis of an object, comprising:
Dependencies are inferred from the claim text.