Method, apparatus, and system for forming code

An apparatus for forming code, comprising:

• a first regulator configured to adjust a substrate while the substrate being transferred to an exposure machine and align an exposure alignment mark on the substrate with the exposure machine;
• a first controller configured to control the exposure machine to form a code formation area on the adjusted substrate;
• a second regulator configured to adjust the substrate while the substrate formed with the code formation area being transferred to a code formation machine to align the exposure alignment mark on the substrate with the code formation machine;
• and
• a second controller configured to control the code formation machine to form an identification code on the code formation area of the adjusted substrate,
• wherein the code formation machine comprises a plurality of alignment lenses of fixed locations, and each of the alignment lenses is formed with a standard alignment mark;
• wherein the substrate is formed with a plurality of exposure alignment marks, and the plurality of exposure alignment marks are respectively aligned with the plurality of standard alignment marks while the exposure alignment marks are aligned with the code formation machine.

A system for forming code, comprising a tool, a control system, an exposure machine and a code formation machine, wherein:

• the tool is configured to transfer a substrate;
• the exposure machine is configured to form a code formation area on the substrate;
• the code formation machine is configured to form an identification code in the code formation area;
• and
• the control system, comprising an apparatus for forming code, and the code formation apparatus comprises:
• a first regulator configured to adjust the substrate to align an exposure alignment mark on the substrate with the exposure machine while the substrate being transferred to an exposure machine;
• a first controller configured to control the exposure machine to form the code formation area on the adjusted substrate;
• a second regulator configured to adjust the substrate to align the exposure alignment mark with the code formation machine while the substrate formed with the code formation area being transferred to the code formation machine;
• and
• a second controller configured to control the code formation machine to form an identification code on the code formation area of the adjusted substrate,
• wherein the code formation machine comprises a plurality of alignment lenses of fixed locations, and each of the alignment lenses is formed with a standard alignment mark;
• wherein the substrate is formed with a plurality of exposure alignment marks, and the plurality of exposure alignment marks are respectively aligned with the plurality of standard alignment marks while the exposure alignment marks are aligned with the code formation machine.