Splicing nano-imprint template with repair adhesive layer, repair method of splicing seam thereof, and manufacturing method thereof

A repair method of a splicing seam of a splicing nano-imprint template, comprising:

• providing a splicing nano-imprint plate, wherein the splicing nano-imprint plate comprises a base substrate and a plurality of splicing modules that are positioned on the base substrate, a splicing seam is provided between adjacent spicing modules, and each of the splicing modules comprises a unit pattern;
• forming a repair adhesive layer at least at the splicing seam;
• and
• performing a patterning process on the repair adhesive layer to form a repair module, wherein the repair module comprises the unit pattern,
• wherein the forming the repair adhesive layer at least at the splicing seam comprises:
• forming a photoresist layer at the splicing seam as the repair adhesive layer
• wherein the performing the patterning process on the repair adhesive layer to form the repair module comprises:
• irradiating a portion of the photoresist layer by using a femtosecond laser so that the photoresist layer comprises a cured portion and an uncured portion;
• and
• removing the uncured portion of the photoresist layer to form the repair module.

A splicing nano-imprint template, comprising:

• a base substrate,
• a nano-imprint structure, positioned on the base substrate, and comprising a plurality of splicing modules and a repair module that is positioned between adjacent splicing modules, wherein the repair module and each of the splicing modules comprise a unit pattern;
• a splicing seam provided between adjacent spicing modules, and each of the splicing modules comprises a unit pattern;
• and
• a repair adhesive layer provided at least at the splicing seam;
• wherein the repair adhesive layer is an imprint adhesive layer, and
• the repair adhesive layer comprises an anti-sticking layer on the splicing modules.