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US 11,307,440 B2Granted
On-chip high capacitance termination for transmitters
AssigneeSkorpios Technologies, Inc.
InventorsStephen B. Krasulick, Damien Lambert, Andrew Bonthron, Guoliang Li
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Abstract
A modulator and a capacitor are integrated on a semiconductor substrate for modulating a laser beam. Integrating the capacitor on the substrate reduces parasitic inductance for high-speed optical communication.
Claims10
A method for modulating a semiconductor modulator, the method comprising:
- applying a modulation signal to a contact, wherein the contact is integrated on a substrate that is part of a platform;
- transmitting the modulation signal to a semiconductor structure, wherein:
- the semiconductor structure has a direct bandgap,
- the semiconductor structure is integrated on the substrate,
- the semiconductor structure is bonded within a recess of the platform,
- the semiconductor structure comprises a first optical waveguide,
- the first optical waveguide is a semiconductor waveguide, and
- the modulation signal applied to the semiconductor structure modulates an optical beam in the first optical waveguide of the semiconductor structure to form a modulated beam;
- shunting the semiconductor structure with a capacitor that is integrated on the substrate;
- and
- transmitting the modulated beam from the first optical waveguide into a second optical waveguide, wherein:
- the second optical waveguide is part of the platform, and
- the second optical waveguide is a semiconductor waveguide.
10 more elements
Dependencies are inferred from the claim text.