Micromechanical micromirror array and corresponding operating method

A micromechanical micromirror array, comprising:

• a frame which includes a cutout;
• a micromirror device suspended in a first plane on the frame in an area of the cutout;
• a first pivoting vane device suspended on the frame in the area of the cutout, the first pivoting vane device being coupled to the micromirror device via a first spring device;
• a second pivoting vane device suspended on the frame, protruding into the area of the cutout, the second pivoting vane being coupled to the micromirror device via a second spring device;
• a first drive device configured to deflect the first pivoting vane device along a first axis which is situated perpendicular to the first plane;
• and
• a second drive device configured to an antiphase deflection of the second pivoting vane device along the first axis;
• wherein the micromirror device is resiliently rotatable out of the first plane by the antiphase deflection of the first pivoting vane device and of the second pivoting vane device about a second axis;
• and
• wherein the first pivoting vane device and the second pivoting vane device extend beyond the second axis on a first side of the micromirror device along a direction of a third axis situated perpendicularly to the second axis,
• wherein the first pivoting vane device is suspended in a first area of the frame in the first plane, extends along a direction of the third axis beyond the second axis, and is connected at its end to a first extension of the micromirror device via the first spring device, and the second pivoting vane device is suspended in the first plane in a second area of the frame situated opposite the first area, extending along the direction of the third axis beyond the second axis, and is connected at its end to a second extension of the micromirror device via the second spring device, the first extension and the second extension being offset in the same direction along the third axis with respect to the second axis.

A micromechanical micromirror array, comprising:

• a frame which includes a cutout;
• a micromirror device suspended in a first plane on the frame in an area of the cutout;
• a first pivoting vane device suspended on the frame in the area of the cutout, the first pivoting vane device being coupled to the micromirror device via a first spring device;
• a second pivoting vane device suspended on the frame, protruding into the area of the cutout, the second pivoting vane being coupled to the micromirror device via a second spring device;
• a first drive device configured to deflect the first pivoting vane device along a first axis which is situated perpendicular to the first plane;
• and
• a second drive device configured to an antiphase deflection of the second pivoting vane device along the first axis;
• wherein the micromirror device is resiliently rotatable out of the first plane by the antiphase deflection of the first pivoting vane device and of the second pivoting vane device about a second axis;
• and
• wherein the first pivoting vane device and the second pivoting vane device extend beyond the second axis on a first side of the micromirror device along a direction of a third axis situated perpendicularly to the second axis,
• wherein the first pivoting vane device is suspended in the first plane in a first area of the frame, extends at an angle along a direction of the second axis and the third axis, extends along a direction of the third axis beyond the second axis, and is connected at its end to a first extension of the micromirror device via the first spring device, and the second pivoting vane device is suspended in the first plane in a second area of the frame, which is laterally offset relative to the first area, extends at an angle along the direction of the second axis and the third axis, extends along the direction of the third axis beyond the second axis, and is connected at its end to a second extension of the micromirror device via the second spring device, the first extension and the second extension being offset in the same direction along the third axis with respect to the second axis, and the micromirror device being suspended on the frame on a second side opposite the first side via a torsion bar.

A micromechanical micromirror array, comprising:

• a frame which includes a cutout;
• a micromirror device suspended in a first plane on the frame in an area of the cutout;
• a first pivoting vane device suspended on the frame in the area of the cutout, the first pivoting vane device being coupled to the micromirror device via a first spring device;
• a second pivoting vane device suspended on the frame, protruding into the area of the cutout, the second pivoting vane being coupled to the micromirror device via a second spring device;
• a first drive device configured to deflect the first pivoting vane device along a first axis which is situated perpendicular to the first plane;
• and
• a second drive device configured to an antiphase deflection of the second pivoting vane device along the first axis;
• wherein the micromirror device is resiliently rotatable out of the first plane by the antiphase deflection of the first pivoting vane device and of the second pivoting vane device about a second axis;
• and
• wherein the first pivoting vane device and the second pivoting vane device extend beyond the second axis on a first side of the micromirror device along a direction of a third axis situated perpendicularly to the second axis,
• wherein the first pivoting vane device and the second pivoting vane device are each coupled on a first side of the micromirror device and on an opposite second side of the micromirror device,
• wherein:
• the first pivoting vane device and the second pivoting vane device each encompass the micromirror device in a forked manner;
• the first pivoting vane device is suspended on the frame in the first plane via a fifth spring device, extends along a direction of the third axis on both sides of the micromirror device beyond the second axis, and is connected at its ends to the micromirror device via the first spring device;
• and
• the second pivoting vane device is suspended on the frame in the first plane via a sixth spring device, extending along the direction of the third axis on both sides of the micromirror device beyond the second axis, and is connected on its ends to the micromirror device via the sixth spring device.

An operating method for a micromechanical micromirror array, comprising the following steps:

• providing the micromechanical mirror array, the micromechanical mirror array including a frame which includes a cutout, a micromirror device suspended in a first plane on the frame in an area of the cutout, a first pivoting vane device suspended on the frame in the area of the cutout, the first pivoting vane device being coupled to the micromirror device via a first spring device, a second pivoting vane device suspended on the frame, protruding into the area of the cutout, the second pivoting vane being coupled to the micromirror device via a second spring device, a first drive device configured to deflect the first pivoting vane device along a first axis which is situated perpendicular to the first plane, and a second drive device configured to an antiphase deflection of the second pivoting vane device along the first axis, wherein the micromirror device is resiliently rotatable out of the first plane by the antiphase deflection of the first pivoting vane device and of the second pivoting vane device about a second axis, and wherein the first pivoting vane device and the second pivoting vane device extend beyond the second axis on a first side of the micromirror device along a direction of a third axis situated perpendicularly to the second axis;
• and
• antiphase deflecting the first pivoting vane device and the second pivoting vane device;
• based on the antiphase deflecting, the micromirror device resiliently rotating about the second axis out of the first plane,
• wherein the first pivoting vane device is suspended in a first area of the frame in the first plane, extends along a direction of the third axis beyond the second axis, and is connected at its end to a first extension of the micromirror device via the first spring device.