Creating time-resolved emission images of integrated circuits using a single-point single-photon detector and a scanning system

A method of improving time-resolved emission (TRE) waveforms corresponding to photon emissions of an electronic device during a test, the method comprising:

• identifying a plurality of locations on the electronic device having equivalent emission signals, wherein the emission signals correspond to photon emissions of the electronic device detected during the test;
• mapping the locations onto a pseudo two-dimensional image of the electronic device;
• combining measurements of photons detected at the locations having the equivalent emission signals to create an improved TRE waveform;
• attributing the improved TRE waveform to each of the locations having the equivalent emission signals;
• extracting drift information for the electronic device using at least one of the improved TRE waveforms attributed to respective locations of the pseudo two-dimensional image of the electronic device;
• and
• correcting, by a scanner, for mechanical drift of the electric device using the drift information.

A non-transitory computer readable storage medium comprising computer executable instructions which when executed by a computer cause the computer to perform a method of improving time-resolved emission (TRE) waveforms representing an electronic device, wherein the TRE waveforms represent photons detected by a photodetector at respective scan locations on the electronic device, the method comprising:

• obtaining a list of the scan locations, wherein each scan location corresponds to a pixel of interest;
• constructing a first waveform for an initial one of the scan locations, wherein the first waveform represents a measurement of the photons detected by the photodetector at the initial one of the scan locations;
• constructing a second waveform by combining a measurement of the photons detected at a subsequent location in the list of scan locations and those used in constructing the first waveform;
• and
• advancing to a next location in the list of scan locations and updating the first waveform to be equal to the second waveform upon determining that a signal-to-noise ratio of the first waveform is less than or equal to a signal-to-noise ratio of the second waveform.