Back to results
US 11,307,247 B2Granted
Prober with busbar mechanism for testing a device under test
AssigneeInfineon Technologies AG
InventorAndreas Gneupel
Life of this patent
Estimating the term…
Abstract
Prober for a test system for testing a device under test is disclosed. In one example, the prober comprises a busbar mechanism for transporting electric signals to and away from the device under test.
Claims19
A prober for a test system for testing a device under test, wherein the prober comprises:
- a busbar mechanism for transporting electric signals to and/or away from the device under test, wherein the busbar mechanism comprises:
- an at least partially electrically conductive first busbar plate for conducting an electric signal to and/or away from the device under test;
- and
- an at least partially electrically conductive second busbar plate for conducting the electric signal to and/or away from the device under test.
1 more element
Dependencies are inferred from the claim text.