In-tool ESD events selective monitoring method and apparatus

An apparatus for detecting electrostatic discharges (ESD) events, the apparatus comprising:

• an ESD detector comprising an attenuator, the ESD detector being configured to detect an ESD event;
• a controller configured to:
• activate a process window in response to a signal corresponding to a command to process a device being handled or tested by a tool;
• activate the ESD detector to detect and report the ESD event occurring during the process window;
• and
• deactivate the process window and control the ESD detector to enter into a standby mode to ignore electromagnetic signals in response a signal corresponding to a command to end the process;
• and
• at least one antenna coupled to said ESD detector;
• wherein
• said ESD detector is calibrated for at least one discharge energy threshold or range of discharge energies by adjusting the attenuator to suppress electromagnetic interference (EMI) outside the at least one discharge energy threshold or the range of discharge energies detected during the process window.