Flow passage

A flow passage provided in a nanopore sensor, the flow passage comprising:

• a substrate;
• and
• a covering member provided at a position corresponding to the substrate;
• wherein the substrate comprises a substrate opening that penetrates the substrate in a first direction, the first direction being a thickness direction of each of the substrate and the covering member;
• wherein the covering member comprises a covering member opening that penetrates the covering material in the first direction;
• wherein the covering member opening is provided such that the substrate opening is not covered with the covering member;
• wherein the covering member is arranged onto the substrate such that a substrate capacitance and a covering member capacitance are connected in series, the substrate capacitance being a capacitance of the substrate and the covering member capacitance being a capacitance of the covering member;
• and
• wherein the covering member capacitance is lower than the substrate capacitance.