Device for measuring secondary electron emission coefficient

A device for measuring a secondary electron emission coefficient, the device comprising:

• a scanning electron microscope comprising an electron emitter and a chamber, wherein the electron emitter is configured to emit a high-energy electron beam;
• a first collecting plate located in the chamber and comprising a first through hole;
• a second collecting plate located in the chamber and comprising a second through hole, wherein the first collecting plate and the second collecting plate are parallel with and spaced apart from each other, and a tested sample is located between the first collecting plate and the second collecting plate;
• a first galvanometer comprising a first terminal and a second terminal and configured to test a current intensity of electrons, wherein the first terminal is connected to the first collecting plate, and the second terminal is connected to the tested sample;
• and the electrons escape from a surface of the tested sample and hit the first collecting plate and the second collecting plate, after the high-energy electron beam hits the tested sample;
• a Faraday cup located in the chamber and comprising an electron inlet, wherein the first through hole, the second through hole, and the electron inlet penetrate through with each other, the high-energy electron beam passes through the first through hole, the second through hole, and the electron inlet, and then enters the Faraday cup;
• a second galvanometer configured to test a current intensity of electrons entering the Faraday cup, wherein a first end of the second galvanometer is connected to the Faraday cup, and a second end of the second galvanometer is grounded;
• and
• a voltmeter comprising a third terminal and a fourth terminal and configured to test a voltage difference between the first collecting plate and the tested sample, wherein the third terminal is connected to the first collecting plate, and the fourth terminal is connected to the tested sample.