Device for adjusting and exchanging beamstops

Abstract

A beamstop arrangement for an x-ray-optical system is adjustable in an xy plane perpendicular to a z-direction for optimizing a ratio of useful radiation reaching a surface to interfering radiation of an x-ray beam in the z-direction. The beamstop arrangement comprises a plurality of beamstops of differing size and/or geometry arranged on an exchanging mount, which is installed on a carriage displaceable in the xy plane by means of a drive unit having at least one positioning motor. The multiple beamstops can be located in a vacuum, while the drive motors and all electronic components can be positioned outside the vacuum, so that no heat development takes place in the measurement region. Corruption of the measurement result due to a changed measurement background is thus avoided.

Dependencies are inferred from the claim text.