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US 11,307,058 B2Granted
Scale and manufacturing method of the same
AssigneeMitutoyo Corporation
InventorToshihiko Aoki
Life of this patent
Estimating the term…
Abstract
A scale includes: a substrate that is made of low expansion glass of which a thermal expansion coefficient is 1×10−7/K or less; and scale gratings having a plurality of gratings that are arranged on a first face of the substrate at a predetermined interval and are made of a transparent inorganic material of which a thermal expansion coefficient is more than 1×10−7/K.
Claims9
A scale comprising:
- a substrate that is made of low expansion glass of which a thermal expansion coefficient is 1×10−7/K or less;
- and
- scale gratings having a plurality of gratings that are arranged on a first face of the substrate at a predetermined interval and are made of a transparent inorganic material of which a thermal expansion coefficient is more than 1×10−7/K,
- wherein the scale gratings have a structure in which the plurality of gratings are provided on a layer-shaped portion made of the transparent inorganic material, on the first face of the substrate,
- wherein the layer-shaped portion is directly provided on the first face of the substrate, and
- wherein the layer-shaped portion has a thickness of more than 0.5 μm and 2.5 μm or less.
3 more elements
Dependencies are inferred from the claim text.