US 11,307,055 B2 · Sensor with magnetic shield

Abstract

A magnetic sensor is disclosed. The magnetic sensor can include a sensing element and a magnetic shield. The sensing element and the magnetic shield can be vertically stacked with one another. The magnetic shield can be a magnetic shield plate that includes ferromagnetic portions spaced laterally by a non-ferromagnetic material. The sensing element can have a first side and a second side opposite the first side. The magnetic shield that can be vertically stacked over the first side of the sensing element. The magnetic shield can be spaced apart from the sensing element by an isolation layer. A passivation layer can cover at least a portion of the sensing element or the magnetic shield. The sensing element can be configured to sense a magnetic field property of a magnetic field source that is positioned on the second side of the sensing element.

Claims20

Dependent claims

A magnetic sensor comprising:

a magnetic shield plate having ferromagnetic portions spaced laterally apart from each other by a non-ferromagnetic material, the magnetic shield plate configured to shield a portion of a magnetic field allowing an un-shielded portion of the magnetic field to pass through the magnetic shield plate vertically;
and
a magnetic field sensing element vertically stacked over the magnetic shield plate, the magnetic field sensing element configured to sense a magnetic field property of the un-shielded magnetic field.

Dependencies are inferred from the claim text.

Sensor with magnetic shield

Life of this patent

Sensor with magnetic shield

Life of this patent

Abstract

Claims20