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US 11,306,788 B2Granted
Carrying device and fixing method of carrying device
AssigneeWuhan China Star Optoelectronics Technology Co., Ltd.
InventorWei Wang
Life of this patent
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Abstract
A carrying device and, a fixing method of a carrying device are provided. The carrying device includes a body and an electromagnet fixing module disposed on the body; wherein the electromagnet fixing module is configured to fix the carrying device. The present application uses the electromagnet fixing module to fix the carrying device, which can avoid downtime of an exposure machine caused by shaking of the carrying device when a robot arm of the exposure machine picks or places the mask form the carrying device so as to improve throughput.
Claims12
A carrying device, comprising:
- a body;
- and
- an electromagnet fixing module disposed on the body;
- wherein the electromagnet fixing module is configured to fix the carrying device, the electromagnet fixing module comprises to first electromagnet fixing sub-module disposed on one side of the body and a second electromagnet fixing sub-module disposed on another side of the body, and the first electromagnet fixing sub-module is disposed opposite to the second electromagnet fixing sub-module:
- and
- wherein a first telescopic arm is disposed on one side of the body, a second telescopic arm is disposed on another side of the body, wherein the first telescopic arm is connected with the first electromagnet fixing sub-module, and the second telescopic arm is connected with the second electromagnet fixing sub-module.
3 more elements
A carrying device, comprising:
- a body;
- an electromagnet fixing module disposed on the body;
- wherein the electromagnet fixing module is configured to fix the carrying device, the electromagnet fixing module comprises a first electromagnet fixing sub-module disposed on one side of the body and a second electromagnet fixing sub-module disposed on another side of the body and the first electromagnet fixing sub-module is disposed opposite to the second electromagnet fixing sub-module;
- wherein a first telescopic arm is disposed on one side of the body, a second telescopic arm is disposed on another side of the body, wherein the first telescopic arm is connected with the first electromagnet fixing sub-module, and the second telescopic arm is connected with the second electromagnet fixing sub-module;
- and
- a power supply module configured to provide a voltage to the electromagnet fixing module, and to magnetize the electromagnet fixing module after power on.
3 more elements
Dependencies are inferred from the claim text.