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US 11,306,394 B2Granted
Iridium precursors for ALD and CVD thin film deposition and uses thereof
AssigneeApplied Materials, Inc.
InventorThomas Knisley
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Abstract
Metal coordination complexes comprising an iridium atom coordinated to at least one diazabutadiene based ligand having a structure represented by: where R1 and R4 are independently selected from the group consisting of C1-C4 alkyl and amino groups, and each of R2 and R3 are independently selected from the group consisting of H, C1-C3 alkyl, or amino groups are described. Processing methods using the metal coordination complexes are also described.
Claims10
A metal coordination complex of the general formula Ir(DAD2)cXdYe, wherein:
- DAD2 is a dianionic diazadiene based ligand
- where R1 and R4 are independently selected from the group consisting of C1-C4 alkyl and amino groups;
- each of R2 and R3 are independently selected from the group consisting of H, C1-C3 alkyl, or amino groups;
- X is one or more of F−, Cl−, Br−, I−, OH− or CN−;
- Y is a neutral ligand not based on DAD or a neutral DAD based ligand;
- and
- c is 1-4, d is 1-8 and e is 0-8.
4 more elements
Dependencies are inferred from the claim text.