Alumina sintered body, method for manufacturing the same, and part for semiconductor manufacturing apparatus
AssigneeFerrotec Material Technologies Corporation
InventorsShunichi Eto, Osanobu Fukuo, Kiyotaka Saitou
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Abstract
An alumina sintered body comprising 0.01 to 1.0 mass % of one or more types selected from Ta, Nb, and V in terms of oxide thereof. The alumina sintered body may further comprise 0.01 to 1.0 mass % of Mg in terms of Mg oxide. It is particularly preferable that the alumina sintered body has an alumina purity of 99% or more. An alumina sintered body having low dielectric loss as compared with that in related art can therefore be produced at low cost.
Claims14
An alumina sintered body comprising 0.01 to 1.0 mass % of one or more types selected from Ta, Nb, and V, and 0.0014 to 0.01 mass % of Na in terms of oxide thereof, wherein Na exists in the form of NaMO3 (M:
- V, Nb, Ta), and OXNa/OX0 is 0.20 or less,
- wherein the OXNa (mass %) is the amount of Na in terms of Na oxide and the OX0 (mass %) is the amount of oxide of the one or more types selected from Ta, Nb, and V, in the alumina sintered body.
Dependencies are inferred from the claim text.