Back to results
US 11,305,984 B2Granted
Water proofing and water detection schemes for MEMS-based environmental sensing devices
AssigneeApple Inc.
InventorsKrishna Prasad Vummidi Murali, Kuolung Lei, Richard Yeh, Yun X. Ma
Life of this patent
Estimating the term…
Abstract
A waterproofed environmental sensing device with water detection provisions includes an environmental sensor to sense one or more environmental properties. The device further includes an electronic integrated circuit implemented on a substrate and coupled to the environmental sensor via a wire bonding. An air-permeable cap structure is formed over the environmental sensor, and a protective layer is formed over the wire bonding to protect the wire bonding against damage.
Claims14
A device comprising:
- an environmental sensor embedded in an electro-mechanical system (MEMS) structure;
- an electronic integrated circuit (IC);
- and
- one or more passive elements,
- wherein:
- the device is partially enclosed in an enclosure,
- the enclosure is at least partially filled with a sensor gel, and
- the one or more passive elements are at least partially exposed above the sensor gel.
5 more elements
A device comprising:
- an environmental sensor configured to sense one or more environmental properties;
- an integrated circuit (IC) coupled to the environmental sensor via a wire bonding;
- a protective layer formed over the wire bonding to protect the wire bonding against a potential damage;
- and
- interdigitated electrodes implementing capacitors capable of detecting environmental aggressors including water, and wherein the interdigitated electrodes are realized using a top metal layer and passivation.
2 more elements
Dependencies are inferred from the claim text.