Back to results
US 11,305,982 B2Granted
Eight spring dual substrate MEMS plate switch and method of manufacture
AssigneeInnovative Micro Technology
InventorsChristopher S. Gudeman, Paul Rubel
Life of this patent
Estimating the term…
Abstract
Systems and methods for forming an electrostatic MEMS plate switch include forming a deformable plate on a first substrate, forming the electrical contacts on a second substrate, and coupling the two substrates using a hermetic seal. A two-fold symmetric switch may be formed by a primary, secondary, and optionally tertiary set of voids formed in the movable plate. These voids may define the spring beams which provide a stable and reliable restoring force to the switch.
Claims18
An electrostatic MEMS device, comprising:
- a first movable plate suspended adjacent to a first substrate and coupled to the first substrate by four pairs of spring beams, wherein the first plate has a square shape with corners and four perpendicular edges, and wherein the each pair has two spring beam members and wherein the two members are substantially collinear and are connected to each corner;
- at least one electrical contact formed on a second substrate, wherein the first plate is configured to move toward the at least one electrical contact;
- and
- a seal which couples the first substrate to the second substrate, and seals the MEMS switch, wherein each pair of spring beams is defined by a primary L-shaped void and a secondary void disposed adjacent and parallel to the primary L-shaped void, at least along a portion of the L-shaped void.
1 more element
A method for manufacturing an electrostatic MEMS device, comprising:
- forming a first movable plate suspended adjacent to a first substrate and coupled to the first substrate by four pairs of spring beams, wherein the first plate has a square shape with corners and four perpendicular edges, and wherein the each pair of spring beams has two spring beam members which are substantially collinear and are connected to each corner;
- forming at least one electrical contact on a second substrate, wherein the first plate is configured to move toward the at least one electrical contact;
- and coupling the first substrate to the second substrate with a seal that seals the MEMS device;
- wherein each pair of spring beams is defined by a primary L-shaped void and a secondary void disposed adjacent and parallel to the primary L-shaped void, at least along a portion of the L-shaped void.
1 more element
Dependencies are inferred from the claim text.