US 11,305,981 B2 · Dual-output microelectromechanical resonator and method of manufacture and operation thereof

Abstract

There is provided a dual-output microelectromechanical system (MEMS) resonator. The MEMS resonator can be operated selectively and concurrently in an in-plane mode of vibration and an out-of-plane mode of vibration to obtain respectively a first electrical signal having a first frequency, and a second electrical signal having a second frequency being less than the first frequency. The first and second electrical signals are mixed to obtain a third electrical signal having a third frequency, where the third frequency is proportional to a temperature of the MEMS resonator. The temperature is determined based on the third frequency. Values of the first and second frequencies can be adjusted based on the determined temperature to compensate for frequency deviations due to temperature deviations. There is also provided methods and systems for determining the temperature of the dual-output MEMS, for compensating the frequency, and a method of manufacturing the dual-output MEMS.

Claims20

Dependent claims

A method for selectively operating a resonator comprising:

operating a microelectromechanical system (MEMS) resonator concurrently in an in-plane mode of vibration and an out-of-plane mode of vibration, wherein operating the MEMS resonator in the in-plane mode of vibration produces a first electrical signal having a first frequency and operating the MEMS resonator in the out-of-plane mode of vibration produces a second electrical signal having a second frequency lower than the first frequency;
receiving a control signal indicative of a desired single mode of vibration corresponding to one of the in-plane mode of vibration or the out-of-plane mode of vibration;
in response to receiving the control signal indicative of the desired single mode of vibration corresponding to one of the in-plane mode of vibration or the out-of-plane mode of vibration, stopping the operation of the MEMS resonator in the other one of the in-plane mode of vibration or the out-of-plane mode of vibration, thereby producing a single electrical signal corresponding to the desired single mode of vibration;
and
outputting the single electrical signal.

2 more elements

A system comprising:

a MEMS resonator;
a first oscillator electrically connectable to the MEMS resonator for operating the MEMS resonator in an in-plane mode of vibration to obtain a first electrical signal having a first frequency;
a second oscillator electrically connectable to MEMS resonator for operating, concurrently with the operating by the first oscillator, the MEMS resonator in an out-of-plane mode of vibration to obtain a second electrical signal having a second frequency lower than the first frequency;
and
a controller in communication with the first oscillator and the second oscillator for controlling the first oscillator and the second oscillator to operate the MEMS resonator in at least one of the in-plane mode of vibration or the out-of-plane mode of vibration.

2 more elements

Dependencies are inferred from the claim text.

Dual-output microelectromechanical resonator and method of manufacture and operation thereof

Life of this patent

Dual-output microelectromechanical resonator and method of manufacture and operation thereof

Life of this patent

Abstract

Claims20