Method of manufacturing substrate laminated body, substrate for liquid ejection head and method of manufacturing substrate for liquid ejection head

A method of manufacturing a substrate for liquid ejection head by joining a first substrate having an ejection orifice for ejecting liquid and a first flow path held in communication with the ejection orifice to supply liquid thereto on a first region of the first substrate and a second substrate having a second flow path to be linked to the first flow path of the first substrate on a first region of the second substrate to complete a liquid flow path, the method comprising:

• a temporarily joining step of arranging an adhesive agent in a region outside the first region of the first substrate and the first region of the second substrate, and temporarily joining the first region of the first substrate and the first region of the second substrate in a non-contact state;
• and
• a finally joining step of forming a film for filling a gap between the first region of the first substrate and the first region of the second substrate, which are in the non-contact state, and for coating a wall surface of the liquid flow path to be formed by the first flow path of the first substrate and the second flow path of the second substrate and finally joining the first substrate and the second substrate by way of the film.