Method of manufacturing microstructure and method of manufacturing liquid ejection head
AssigneeCanon Kabushiki Kaisha
InventorSatoshi Tsutsui
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AssigneeCanon Kabushiki Kaisha
InventorSatoshi Tsutsui
Estimating the term…
A microstructure including a minute structural part is manufactured by transferring a laminate including a photosensitive resin composition onto a substrate having an opening and patterning the laminate. The laminate includes a first layer that includes a first resin composition and a second layer that includes a second resin composition, each of the first and second resin compositions being a negative type photosensitive resin composition including a cationically polymerizable compound having an epoxy group. The laminate is transferred such that the second layer faces the substrate. The first resin composition is in a liquid state and the second resin composition is in a liquid state in the course of transferring the laminate.
A method of manufacturing a microstructure, the method comprising steps of:
A method of manufacturing a liquid ejection head including a nozzle layer that has an ejection orifice for ejecting liquid and a flow path that communicates with the ejection orifice, and an element substrate that has an energy generating element configured to generate energy for ejecting liquid from the ejection orifice and a liquid supply port which communicates with the flow path for supplying liquid, the method comprising steps of:
Dependencies are inferred from the claim text.