Jig for a polishing apparatus

A method of dismounting at least a part of a top ring for holding a substrate, comprising the steps of:

• setting a jig on a polishing table or a polishing surface of a polishing pad placed on the polishing table;
• the jig comprising:
• a movable plate for supporting at least a part of the top ring, which is in a dismounted state;
• a base plate;
• an elastic membrane disposed between the base plate and the movable plate, a pressure chamber is defined between the base plate and the elastic membrane;
• a plurality of posts for positioning the jig at a predetermined position relative to the top ring, the plurality of posts being configured to be engaged with the top ring;
• and
• a drive mechanism for moving the movable plate in a direction toward and away from the top ring, the drive mechanism configured to feed fluid into and discharge the fluid from the pressure chamber;
• moving the jig to right under the top ring;
• raising a movable plate of the jig to make the movable plate support the part of the top ring;
• separating the part of the top ring from a top ring body;
• and
• lowering the movable plate.

A method of mounting at least a part of a top ring for holding a substrate onto a top ring body, comprising the steps of:

• setting a jig on a polishing table or a polishing surface of a polishing pad placed on the polishing table;
• the jig comprising:
• a movable plate for supporting at least a part of the top ring, which is in a dismounted state;
• a base plate;
• an elastic membrane disposed between the base plate and the movable plate, a pressure chamber is defined between the base plate and the elastic membrane;
• a plurality of posts for positioning the jig at a predetermined position relative to the top ring, the plurality of posts being configured to be engaged with the top ring;
• and
• a drive mechanism for moving the movable plate in a direction toward and away from the top ring, the drive mechanism configured to feed fluid into and discharge the fluid from the pressure chamber;
• placing the part of the top ring on the movable plate of the jig;
• moving the jig to right under the top ring body;
• raising the movable plate of the jig to bring the part of the top ring on the movable plate into contact with the top ring body;
• joining the part of the top ring to the top ring body;
• and
• lowering the movable plate.

A jig for mounting/dismounting at least a part of a top ring for holding a substrate, comprising:

• a movable plate for supporting at least a part of the top ring, which is in a dismounted state;
• a plurality of posts for positioning the jig at a predetermined position relative to the top ring, the plurality of posts being configured to be engaged with the top ring;
• and
• a drive mechanism for moving the movable plate in a direction toward and away from the top ring,
• wherein the jig is disposed on a polishing table for supporting a polishing pad,
• the jig further comprises an extension table including a surface which is level with a surface of the polishing table or a polishing surface of the polishing pad placed on the polishing table, the extension table being mountable on and dismountable from the polishing table, wherein
• the movable plate, the base plate, the plurality of posts, and the drive mechanism are disposed on the polishing table and the extension table.

A method of dismounting at least a part of a top ring for holding a substrate, comprising the steps of:

• setting a jig on a polishing table or a polishing surface of a polishing pad placed on the polishing table;
• the jig comprising:
• a movable plate for supporting at least a part of the top ring, which is in a dismounted state;
• a plurality of posts for positioning the jig at a predetermined position relative to the top ring, the plurality of posts being configured to be engaged with the top ring;
• and
• a drive mechanism for moving the movable plate in a direction toward and away from the top ring;
• moving the jig to right under the top ring;
• raising a movable plate of the jig to make the movable plate support the part of the top ring;
• separating the part of the top ring from a top ring body;
• and
• lowering the movable plate.

A method of mounting at least a part of a top ring for holding a substrate onto a top ring body, comprising the steps of:

• setting a jig on a polishing table or a polishing surface of a polishing pad placed on the polishing table;
• the jig comprising:
• a movable plate for supporting at least a part of the top ring, which is in a dismounted state;
• a plurality of posts for positioning the jig at a predetermined position relative to the top ring, the plurality of posts being configured to be engaged with the top ring;
• and
• a drive mechanism for moving the movable plate in a direction toward and away from the top ring;
• placing the part of the top ring on the movable plate of the jig;
• moving the jig to right under the top ring body;
• raising the movable plate of the jig to bring the part of the top ring on the movable plate into contact with the top ring body;
• joining the part of the top ring to the top ring body;
• and
• lowering the movable plate.