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US 11,299,817 B2Granted
Holder for holding substrate and system for plating
AssigneeEbara Corporation
InventorsShota Moriyama, Matsutaro Miyamoto
Life of this patent
Estimating the term…
Abstract
There is provided a substrate holder for holding a substrate including a first holding member having a first opening portion for exposing a first surface of the substrate, and a second holding member configured to hold the substrate together with the first holding member and having a second opening portion for exposing a second surface of the substrate, wherein the first holding member has at least one first external connection contact, and the second holding member has at least one second external connection contact that is independent of the first external connection contact.
Claims15
A holder for holding a substrate, comprising:
- a first holding member having a first opening portion for exposing a first surface of the substrate, and
- a second holding member configured to hold the substrate together with the first holding member and having a second opening portion for exposing a second surface of the substrate,
- wherein the first holding member has at least one first substrate contact configured to supply an electric current to the first surface of the substrate, at least one first external connection contact, and at least one first wiring configured to electrically connect the at least one first substrate contact with the at least one first external connection contact,
- wherein the second holding member has at least one second substrate contact configured to supply an electric current to the second surface of the substrate, at least one second external connection contact, and at least one second wiring configured to electrically connect the at least one second substrate contact with the at least one second external connection contact, and
- wherein the at least one first external connection contact and the at least one second external connection contact are electrically independent, and
- the first holding member has:
- a first main body portion having the first opening portion and the at least one first substrate contact;
- a first arm portion having at least the one first external connection contact;
- and
- a first wiring storage portion disposed between the first main body portion and the first arm portion and configured to store an extra length of the at least one first wiring.
7 more elements
A system for plating, comprising:
- a holder for holding a substrate;
- a substrate attaching/detaching portion configured to attach/detach the substrate to/from the holder;
- a plating tank configured to apply a plating treatment to the holder holding the substrate;
- and
- a transport machine configured to transport the holder,
- wherein the holder comprises:
- a first holding member having a first opening portion for exposing a first surface of the substrate, and
- a second holding member configured to hold the substrate together with the first holding member and having a second opening portion for exposing a second surface of the substrate,
- wherein the first holding member has at least one first substrate contact configured to supply an electric current to the first surface of the substrate, at least one first external connection contact, and at least one first wiring configured to electrically connect the at least one first substrate contact with the at least one first external connection contact,
- wherein the second holding member has at least one second substrate contact configured to supply an electric current to the second surface of the substrate, at least one second external connection contact, and at least one second wiring configured to electrically connect the at least one second substrate contact with the at least one second external connection contact, and
- wherein the at least one first external connection contact and the at least one second external connection contact are electrically independent, and
- the first holding member has:
- a first main body portion having the first opening portion and the at least one first substrate contact;
- a first arm portion having at least the one first external connection contact;
- and
- a first wiring storage portion disposed between the first main body portion and the first arm portion and configured to store an extra length of the at least one first wiring.
13 more elements
Dependencies are inferred from the claim text.