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US 11,299,801 B2Granted
Structure and method to fabricate highly reactive physical vapor deposition target
AssigneeInternational Business Machines Corporation
InventorsStephen L. Brown, Bruce B. Doris, Mark C. Reuter
Life of this patent
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Abstract
A physical vapor deposition (PVD) target that includes a body composed of material that is reactive with an oxygen containing atmosphere; and a non-reactive cap layer encapsulating at least a sputter surface of the body. The non-reactive cap layer is a barrier obstructing the diffusion of oxygen containing species to the body of the PVD target.
Claims20
A target comprising:
- a body comprised of a deposition material;
- and
- a non-reactive cap layer encapsulating at least a portion of the body, wherein a composition for the non-reactive cap layer is selected from the group consisting of titanium oxide (TiO2), tantalum nitride (TaN), chromium oxide, tantalum oxide, carbon, graphene, diamond like carbon (DLC), amorphous carbon and combinations thereof.
A method for forming a target comprising:
- providing a target body comprised of deposition material;
- and
- depositing a non-reactive cap layer encapsulating at least a surface of the body, wherein a composition for the non-reactive cap layer is selected from the group consisting of titanium oxide (TiO2), tantalum nitride (TaN), chromium oxide, tantalum oxide, carbon, graphene, diamond like carbon (DLC), amorphous carbon and combinations thereof.
A deposition method comprising:
- providing a target having a body composed of a deposition material and a non-reactive cap layer encapsulating the body, wherein a composition for the non-reactive cap layer is selected from the group consisting of titanium oxide (TiO2), tantalum nitride (TaN), chromium oxide, tantalum oxide, carbon, graphene, diamond like carbon (DLC), amorphous carbon and combinations thereof, and combinations thereof;
- positioning the target within a deposition chamber;
- exposing a surface of the body of the target underlying the non-reactive cap layer;
- and
- depositing the deposition material of the body of the target onto a deposition surface of an article to be coated.
2 more elements
Dependencies are inferred from the claim text.