Active energy radiation unit and active energy radiation device
AssigneeHamamatsu Photonics K.K.
InventorsKyoichi Murayama, Keita Umeno, Ryotaro Matui
Life of this patent
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Abstract
An active energy radiation unit includes a light source which radiates ultraviolet rays onto a target object, and a main gas supply mechanism which is disposed to be adjacent to the light source and ejects an inert gas. The main gas supply mechanism includes a receiving part which receives the inert gas, and a main ejection port which is provided at a position between the receiving part and the light source and closer to the target object than the receiving part. A flow path area from the receiving part to the main ejection port is constant.
Claims14
An active energy radiation unit comprising:
- an active energy radiation part which radiates active energy rays onto a target object that passes along a transfer direction intersecting a width direction of the target object in in an active energy radiation region extending in the width direction;
- and
- a main gas supply mechanism which is disposed upstream of the active energy radiation part in the transfer direction, and ejects an inert gas for forming an inactive region including the active energy radiation region between the target object and the active energy radiation part,
- wherein the main gas supply mechanism includes:
- a socket which receives the inert gas that has been compressed;
- a first flow path part which receives the inert gas discharged from the socket;
- a second flow path part which receives the inert gas from the first flow path part and causes the inert gas to flow along a direction of an axis of the socket, the second flow path part having a flow path area that is smaller than a flow path area of the first flow path part;
- and
- an ejection port which ejects the inert gas toward the target object,
- wherein the first flow path part includes a rectifying surface intersecting with the axis of the socket, and the inert gas that flows through the first flow path part flows along the rectifying surface after colliding with the rectifying surface and is guided to the second flow path part.
Dependencies are inferred from the claim text.