Prevention of dripping of material for material injection
AssigneeInternational Business Machines Corporation
InventorsToyohiro Aoki, Eiji Nakamura, Takashi Hisada
Life of this patent
Estimating the term…
Abstract
An injection apparatus for injection material is disclosed. The injection apparatus includes a tank for storing material. The injection apparatus further includes a head body that has a surface for contacting a substrate and an opening part opened at the surface for discharging the material in fluid-communication with the tank. The injection apparatus further includes a member connected to the opening part, in which the member allows gas to flow into and flow out from the opening part.
Claims14
An injection apparatus for injecting material, comprising:
- a first tank for storing a material, the first tank including a first valve;
- a second tank in fluid communication with the first tank via a single flow channel, the second tank including a second valve;
- and
- a head body having a surface for contacting a substrate and an opening part opened at the surface for discharging the material in fluid-communication with the first tank;
- wherein the second valve enables gas to flow into and flow out from the opening part and wherein the head body is horizontally aligned with the single flow channel.
A material injection system for injecting material, comprising
- a stage for receiving a substrate;
- an injection apparatus comprising:
- a first tank for storing a material, the first tank including a first valve;
- a second tank in fluid communication with the first tank via a single flow channel, the second tank including a second valve;
- a head body having a surface for contacting the substrate on the stage and an opening part opened at the surface for discharging the material in fluid-communication with the first tank;
- wherein the second valve enables gas to flow into and flow out from the opening part and wherein the head body is horizontally aligned with the single flow channel;
- a position controller to control a relative position of the injection apparatus with respect the substrate on the stage;
- and
- a flow controller to control a flow of the material.
Dependencies are inferred from the claim text.