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US 11,237,480 B2Granted
Imprint templates and methods for forming imprinted patterns using the same
AssigneeSK hynix Inc.
InventorWooyung Jung
Life of this patent
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Abstract
Methods for forming imprinted patterns using an imprint template. The imprint template may include at least an imprint portion and a photomask portion. The imprint portion may include imprinting patterns. The imprinting patterns may be transferred into a first imprint shot region of a resist layer. The photomask portion may include light blocking patterns. The light blocking patterns may provide a light permeation area corresponding to a boundary region defining a second imprint shot region of the resist layer.
Claims4
An imprint template comprising:
- an imprint portion including imprinting patterns which are transferred into a first imprint shot region of a resist layer;
- and
- a photomask portion including light blocking patterns that provide a light permeation area corresponding to a boundary region defining a second imprint shot region of the resist layer,
- wherein the light blocking patterns include:
- a plurality of first light blocking patterns arranged to surround a field region comprised of the imprinting patterns;
- and
- a second light blocking pattern disposed to surround an array of the plurality of first light blocking patterns to have a frame-shaped feature in a plane view,
- wherein the field region is aligned with the first imprint shot region,
- one of the first light blocking patterns overlaps with the second imprint shot region of the resist layer, and
- the light permeation area is located to correspond to the boundary region defining the second imprint shot region as a next imprint shot region adjacent to the first imprint shot region.
7 more elements
Dependencies are inferred from the claim text.