Pellicle and method for producing the same
AssigneeShin-Etsu Chemical Co., Ltd.
InventorAkinori Nishimura
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Abstract
The present invention is to provide a pellicle characterized by including a pellicle film and a pellicle frame, in which the pellicle film is stretched on the pellicle frame, and the pellicle film is an annealed pellicle film, and to provide a method for producing a pellicle by stretching a pellicle film on a pellicle frame, including the step of annealing the pellicle film alone before stretching the pellicle film on the pellicle frame, annealing the pellicle after stretching the pellicle film on the pellicle frame, or annealing the pellicle film alone and the pellicle both before and after stretching the pellicle film on the pellicle frame.
Claims15
A pellicle, comprising a pellicle film and a pellicle frame, the pellicle film being stretched on the pellicle frame, wherein a film tension (film frequency) of the pellicle film stretched on the pellicle frame is 32 Hz or more.
Dependencies are inferred from the claim text.