A scanning probe microscope combined with a device for modifying the surface of an object and scanning, comprising a base, on which are mounted a piezo scanner unit with piezo scanner having the longitudinal axis 0-01, disposed along the first coordinate X, wherein an object holder is secured on the piezo scanner with object, which has a measurement surface disposed in the plane of the second coordinate Y and third coordinate Z, also containing a probe unit with probe holder, in which a probe is secured which has the capability of interacting with the measurement surface of the object, a punch unit with punch also being mounted on the base and having a cutting edge arranged on a punch drive, wherein the cutting edge is disposed along the second coordinate Y and has the capability of interacting with the object, the piezo scanner having the capability of moving the object holder along the first coordinate X, along the second coordinate Y, and along the third coordinate Z, and provides scanning of the object in the plane of the second coordinate Y and third coordinate Z, as well as its movement along the coordinate X, characterized in that the punch drive is a three-coordinate drive and provides movement of the punch along the first coordinate X, along the second coordinate Y, and along the third coordinate Z, and the probe unit is mounted on the punch drive.