Back to results
US 11,231,655 B2Granted
Control apparatus, exposure apparatus, and manufacturing method for article
AssigneeCanon Kabushiki Kaisha
InventorTakeshi Motegi
Life of this patent
Estimating the term…
Abstract
To provide a control apparatus, with which driving of a driving unit can be controlled with high accuracy with a simple configuration, the control apparatus (100) according to the present invention include: a plurality of current sources (20) each being configured to supply current based on a PWM method; a first detection unit configured to detect a driving state of a driving unit (14); and a control unit (50) configured to change values of a plurality of currents (Ixf, Ixb, Iyl, and Iyr) which are supplied from the plurality of current sources (20) based on a result of the detection by the first detection unit, and which are required to drive the driving unit (14), when a value of at least one of the plurality of currents (Ixf, Ixb, Iyl, and Iyr) is a predetermined value.
Claims17
A control apparatus for controlling a driving unit, the control apparatus comprising:
- a plurality of current sources each being configured to supply current based on a PWM method;
- a first detection unit configured to detect a driving state of the driving unit;
- and
- a control unit configured to change values of a plurality of currents which are supplied from the plurality of current sources based on a result of the detection by the first detection unit, and which are required to drive the driving unit, in a case where a value of at least one of the plurality of currents is a predetermined value, such that a total value expressed by a vector sum of the plurality of currents is not changed,
- wherein a thrust force generated by the driving unit is proportional to the total value expressed by the vector sum of the plurality of currents.
2 more elements
An exposure apparatus comprising:
- a control apparatus for controlling a driving unit, the control apparatus comprising:
- a plurality of current sources each being configured to supply current based on a PWM method;
- a first detection unit configured to detect a driving state of the driving unit;
- and
- a control unit configured to change values of a plurality of currents which are supplied from the plurality of current sources based on a result of the detection by the first detection unit, and which are required to drive the driving unit, in a case where a value of at least one of the plurality of currents is a predetermined value, such that a total value expressed by a vector sum of the plurality of currents is not changed,
- wherein a thrust force generated by the driving unit is proportional to the total value expressed by the vector sum of the plurality of currents;
- and
- a stage driven with use of current supplied by the control apparatus.
5 more elements
A manufacturing method for an article comprising:
- exposing a substrate using an exposure apparatus comprising:
- a control apparatus for controlling a driving unit, the control apparatus comprising:
- a plurality of current sources each being configured to supply current based on a PWM method;
- a first detection unit configured to detect a driving state of the driving unit;
- and
- a control unit configured to change values of a plurality of currents which are supplied from the plurality of current sources based on a result of the detection by the first detection unit, and which are required to drive the driving unit, in a case where a value of at least one of the plurality of currents is a predetermined value, such that a total value expressed by a vector sum of the plurality of currents is not changed,
- wherein a thrust force generated by the driving unit is proportional to the total value expressed by the vector sum of the plurality of currents;
- and
- a stage driven with use of current supplied by the control apparatus;
- and
- developing the substrate,
- wherein the article is manufactured from the developed substrate.
9 more elements
A control apparatus for controlling a driving unit with a plurality of linear motors, the control apparatus comprising:
- a plurality of current sources each being configured to supply current to a corresponding linear motor of the plurality of linear motors based on a PWM method;
- a first detection unit configured to detect a driving state of the driving unit;
- and
- a control unit configured to change values of a plurality of currents which are supplied from the plurality of current sources based on a result of the detection by the first detection unit, and which are required to drive the driving unit, in a case where a value of at least one of the plurality of currents is a predetermined value, such that a thrust force generated by driving unit is not changed,
- wherein each of the plurality of linear motors generates a thrust force in a different direction from each other, and
- wherein the thrust force generated by the driving unit corresponds to a sum of the respective thrust forces generated by the plurality of linear motors.
3 more elements
An exposure apparatus comprising:
- a control apparatus for controlling a driving unit with a plurality of linear motors, the control apparatus comprising:
- a plurality of current sources each being configured to supply current to a corresponding linear motor of the plurality of linear motors based on a PWM method;
- a first detection unit configured to detect a driving state of the driving unit;
- and
- a control unit configured to change values of a plurality of currents which are supplied from the plurality of current sources based on a result of the detection by the first detection unit, and which are required to drive the driving unit, in a case where a value of at least one of the plurality of currents is a predetermined value, such that a thrust force generated by driving unit is not changed,
- wherein each of the plurality of linear motors generates a thrust force in a different direction from each other, and
- wherein the thrust force generated by the driving unit corresponds to a sum of the respective thrust forces generated by the plurality of linear motors;
- and
- a stage driven with use of current supplied by the control apparatus.
6 more elements
A manufacturing method for an article comprising:
- exposing a substrate using an exposure apparatus comprising:
- a control apparatus for controlling a driving unit with a plurality of linear motors, the control apparatus comprising:
- a plurality of current sources each being configured to supply current to a corresponding linear motor of the plurality of linear motors based on a PWM method;
- a first detection unit configured to detect a driving state of the driving unit;
- and
- a control unit configured to change values of a plurality of currents which are supplied from the plurality of current sources based on a result of the detection by the first detection unit, and which are required to drive the driving unit, in a case where a value of at least one of the plurality of currents is a predetermined value, such that a thrust force generated by driving unit is not changed,
- wherein each of the plurality of linear motors generates a thrust force in a different direction from each other, and
- wherein the thrust force generated by the driving unit corresponds to a sum of the respective thrust forces generated by the plurality of linear motors;
- and
- a stage driven with use of current supplied by the control apparatus;
- and developing the substrate,
- wherein the article is manufactured from the developed substrate.
9 more elements
Dependencies are inferred from the claim text.