Automotive exhaust gas sensor with two calibration portions
AssigneeSensata Technologies, Inc.
InventorsDimitar Kirilov Kostov, Vladimir Sabev Shehov, Boryana Hristova Todorova
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Abstract
A method of manufacturing a sensor include depositing a metal layer on a substrate and fabricating a calibration structure on the metal layer. The calibration structure can include a first calibration portion and a second calibration portion. The method may further include, performing a first calibration of the sensor by modifying the first calibration portion. In addition, the method can include placing a cover layer on a portion of the first calibration portion after the first calibration and then performing a second calibration of the sensor by modifying the second calibration.
Claims18
A method of manufacturing a sensor, comprising:
- depositing a metal layer on a substrate;
- fabricating a calibration structure having a first calibration portion and a second calibration portion on the metal layer;
- performing a first calibration of the sensor by modifying the first calibration portion;
- placing a cover layer on a portion of the first calibration portion;
- placing at least one passivation layer between the cover layer and the first calibration portion;
- and
- performing a second calibration of the sensor by modifying the second calibration portion after placing the cover on the portion of the first calibration portion.
A sensor, comprising:
- a substrate having a calibration structure including a first calibration portion and a second calibration portion;
- and
- a cover layer in contact with the first calibration portion,
- at least one passivation layer between the cover layer and the first calibration portion
- wherein at least a portion of the second calibration portion is free of contact with the cover layer, and
- wherein the second calibration portion has been modified subsequent to placement of the cover layer in contact with the first calibration portion.
A sensor, comprising:
- a substrate;
- a meander portion provided on the substrate;
- a calibration portion provided on the substrate and coupled to the meander portion;
- a first cover layer in contact with the meander portion and not in contact with the calibration portion,
- wherein the calibration portion has been modified subsequent to placement of the first cover layer in contact with the meander portion;
- and
- at least one passivation layer between the cover layer and the calibration portion.
Dependencies are inferred from the claim text.