Semi-automatic prober
AssigneeQualiTau, Inc.
InventorsEdward McCloud, Jacob Herschmann
Life of this patent
Estimating the term…
Abstract
A wafer probe station system for reliability testing of a semiconductor wafer. The wafer probe station is capable of interfacing with interchangeable modules for testing of semiconductor wafers. The wafer probe station can be used with different interchangeable modules for wafer testing. Modules, such as probe card positioners and air-cooled rail systems, for example, can be mounted or docked to the probe station. The wafer probe station is also provided with a front loading mechanism having a rotatable arm that rotates at least partially out of the probe station chamber for wafer loading.
Claims15
A wafer probe station, comprising a probe station chamber comprising a chuck within the probe station chamber and a mounting plate capable of accepting a module selected from a plurality of different interchangeable modules, wherein the mounting plate is on a top surface of the wafer probe station and wherein each module is configured for interfacing at least one probe card with a wafer positioned on the chuck in the probe station chamber, wherein a module can be swapped for a different module and the mounting plate provides multiple ways for the wafer probe station to interface with a wafer by allowing different interchangeable modules to dock with the mounting plate when a module is positioned over the mounting plate, and wherein the plurality of different interchangeable modules comprises different types of modules including a probe positioner configured to align the at least one probe card with the wafer, an air-cooled rail assembly for supporting probe cards for testing multiple die on the wafer, and an adaptor for 4.5″ or 6″ probe cards, and wherein each type of module has a function that is different from functions of the other types of modules, wherein the mounting plate and each interchangeable module has mounting holes that are commonly sized and positioned for to allow for each module to be docked to the mounting plate using a fastener.
A semi-automatic wafer probe station, comprising:
- an interface capable of accepting a module selected from a plurality of different interchangeable modules, wherein each module is configured for interfacing at least one probe card with a wafer, wherein a module can be swapped for a different module;
- a chuck;
- and
- a rotating arm comprising a first segment and a second segment to directly support the wafer, wherein the wafer is supported by both the first segment and the second segment, and wherein the arm is configured to rotate and pivot out of an opening in a front surface of the wafer probe station such that the first segment and the second segment are outside the wafer probe station to accept the wafer on a top surface of the first segment and on a top surface of the second segment and the arm is also configured to rotate and pivot into the wafer probe station to load the wafer to a surface of the chuck such that the arm is completely within the wafer probe station, wherein the first segment and the second segment are configured to retract away from the wafer and the chuck after loading the wafer to the surface of the chuck, and wherein the first segment and the second segment rotate about a first end of the rotating arm away from one another when the first segment and the second segment retract away from the wafer and the chuck.
Dependencies are inferred from the claim text.