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US 11,145,427 B2Granted
Tool and method for particle removal
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorYu-Liang Tseng
Life of this patent
Estimating the term…
Abstract
A particle removal tool includes a workpiece holder and an optical tweezer. The workpiece holder is configured to support a workpiece. The optical tweezer is configured to emit a plurality of focused light beams to the workpiece, wherein the plurality of focused light beams are respectively converged to focal points between the optical tweezer and the workpiece, and are configured to take particles away from the workpiece.
Claims20
A particle removal tool, comprising:
- a workpiece holder, configured to support a workpiece;
- an optical tweezer, configured to emit a plurality of focused light beams to the workpiece, wherein the plurality of focused light beams are respectively converged to focal points between the optical tweezer and the workpiece, and are configured to take particles away from the workpiece;
- a sensor, configured to sense the plurality of focused light beams from the workpiece;
- and
- a plurality of beam splitters, disposed between the optical tweezer and the workpiece, the plurality of beam splitters configured to respectively deliver the plurality of focused light beams from the optical tweezer to the workpiece, and respectively deliver the plurality of focused light beams reflected by the workpiece to the sensor.
2 more elements
A particle removal tool, comprising:
- a workpiece holder, configured to support a workpiece;
- and
- a light source, configured to emit a light beam;
- a plurality of optical lenses, disposed on a transmission path of the light beam, and configured to convert the light beam into a plurality of focused light beams, wherein the plurality of focused light beams are respectively converged to focal points between the plurality of optical lenses and the workpiece, and are configured to take particles away from the workpiece;
- a sensor, configured to sense the plurality of focused light beams from the workpiece;
- and
- a plurality of beam splitters, disposed between the plurality of optical lenses and the workpiece, the plurality of beam splitters configured to respectively deliver the plurality of focused light beams from the plurality of optical lenses to the workpiece, and respectively deliver the plurality of focused light beams reflected by the workpiece to the sensor.
4 more elements
A method for particle removal, the method comprising:
- loading a workpiece;
- providing an optical tweezer emitting a plurality of focused light beams to the workpiece, wherein the plurality of focused light beams are respectively converged to focal points between the optical tweezer and the workpiece;
- removing particles on the workpiece by the plurality of focused light beams, such that the particles are removed from the workpiece;
- monitoring the particles on the workpiece by a sensor;
- and
- providing a plurality of beam splitters between the optical tweezer and the workpiece, so that the plurality of focused light beams from the optical tweezer are delivered to the workpiece by the plurality of beam splitters, are reflected by the workpiece and are delivered to the sensor by the plurality of beam splitters in sequence.
3 more elements
Dependencies are inferred from the claim text.