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US 11,143,957 B2Granted
Apparatus for separating a master template from a replica template
AssigneeCanon Kabushiki Kaisha
InventorByung-Jin Choi
Life of this patent
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Abstract
An apparatus is described for separation of a nanoimprint template from a solidified patterned layer on a substrate that minimize separation defects, including last point of separation (LPOS) defects. The apparatus is configured to move the template and substrate relative to one another and determining an amount of pressure to apply to the backsides of the template and the substrate.
Claims13
An apparatus comprising:
- a template chuck or holder configured to hold a cored-out master template;
- a substrate chuck or holder configured to hold a cored-out replica template;
- an actuator system configured to adjust the position of the cored-out master template and the cored-out replica template relative to one another;
- a pressure system configured to apply a back pressure to the cored-out master template and the cored-out replica template;
- and
- a controller in communication with the pressure system, the controller configured to:
- determine the amount of pressure to apply to the backsides of the cored-out master template and the cored-out replica template, such that a slope of a movement of the cored-out master template relative to the cored-out replica template as a function of contact radius of a demarcation between a contact area and a separated area is controlled, and
- provide a signal to the pressure system such that the pressure system applies the determined amount of back pressure to the cored-out master template and the cored-out replica template.
5 more elements
Dependencies are inferred from the claim text.