Radiation heater arrangement
AssigneeEvatec AG
InventorsJuergen Weichart, Rolf Bazlen
Life of this patent
Estimating the term…
Abstract
An electrical radiation heater arrangement for a vacuum enclosure includes at least two sets of linear heating sources, arranged in a corresponding number of concentric heating zones. The heating sources are arranged directly on the vacuum side of the vacuum enclosure and electrically connected to current rails arranged on the vacuum side with each of the current rails being connected to one electrical feedthrough from vacuum to ambient. Preferably, the heating sources are arranged in a polygon approaching a circle, essentially radially or a combination of both.
Claims18
An electrical radiation heater arrangement including a vacuum enclosure, the electrical radiation heater arrangement disposed in the vacuum enclosure and comprising:
- at least two sets of linear heating sources, arranged in a corresponding number of concentric heating zones,
- each of said sets of linear heating sources being arranged directly on a vacuum side of the vacuum enclosure and the linear heating sources of each set having a first end electrically connected to another linear heating source and a second end electrically connected to a common current rail arranged on the vacuum side, and
- with each of the common current rails being connected to one electrical feedthrough that passes through a wall of the vacuum enclosure from vacuum to ambient.
An apparatus including:
- a vacuum enclosure;
- and
- an electrical radiation heater arrangement disposed in the vacuum enclosure and comprising:
- at least two sets of linear heating sources, arranged in a corresponding number of concentric heating zones,
- each of said sets of linear heating sources being arranged directly on a vacuum side of the vacuum enclosure and the linear heating sources of each set having a first end electrically connected to another linear heating source and a second end electrically connected to a common current rail arranged on the vacuum side, and
- with each of the common current rails being connected to one electrical feedthrough that passes through a wall of the vacuum enclosure from vacuum to ambient.
Dependencies are inferred from the claim text.