Simplified lamp design
AssigneeApplied Materials, Inc.
InventorJoseph M. Ranish
Life of this patent
Estimating the term…
Abstract
Embodiments of the present invention generally relate to simplified, high voltage, tungsten halogen lamps for use as source of heat radiation in a rapid thermal processing (RTP) chamber or other lamp heated thermal processing chambers. Embodiments include a lamp design that includes an external fuse while reducing the number of part and expense of prior art lamps. In addition, embodiments of the lamps described herein provide sufficient rigidity to handle compressive forces of inserting the lamps into a heating assembly base, while maintaining a simplified fuse design.
Claims10
A lamp assembly, comprising:
- a capsule having a filament disposed therein;
- a press seal extending from the capsule and configured to hermetically seal the capsule;
- a first lead and a second lead, wherein each of the first and second leads is electrically coupled to the filament, a first end of each of the first and second leads disposed within the press seal;
- an insulative sleeve directly coupled to a second end of the first lead and spaced a distance from the press seal, the insulative sleeve comprising plastic material or filled with glass beads;
- a conductive cap or pin coupled to the insulative sleeve;
- and
- a fuse electrically coupling the first lead to the conductive cap or pin.
A lamp assembly, comprising:
- a capsule having a filament disposed therein;
- a press seal extending from the capsule and configured to hermetically seal the capsule;
- a first lead and a second lead, wherein each of the first and second leads is electrically coupled to the filament, a first end of each of the first and second leads disposed within the press seal;
- a first insulative sleeve directly coupled to a second end of the first lead and spaced a distance from the press seal;
- a first conductive cap or pin coupled to the first insulative sleeve;
- a first fuse electrically coupling the first lead to the first conductive cap or pin;
- a second insulative sleeve coupled to a second end of the second lead and spaced apart from the press seal;
- a second conductive pin coupled to the second insulative sleeve;
- and
- a second fuse electrically coupling the second lead to the second conductive pin.
Dependencies are inferred from the claim text.