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US 11,121,696 B2Granted
Electrode defined resonator
AssigneeII-Vi Delaware, Inc.
InventorsDi Lan, Wen-Qing Xu, Giovanni Barbarossa
Life of this patent
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Abstract
A bulk acoustic resonator operable in a bulk acoustic mode includes a resonator body mounted to a separate carrier that is not part of the resonator body. The resonator body includes a piezoelectric layer, a device layer, and a top conductive layer on the piezoelectric layer opposite the device layer. A surface of the device layer opposite the piezoelectric layer is for mounting the resonator body to the carrier.
Claims17
A bulk acoustic resonator comprising:
- a resonator body including:
- a piezoelectric layer having a thickness;
- a device layer;
- and
- a top conductive layer on the piezoelectric layer opposite the device layer and having a plurality of first conductive lines or fingers that are spaced from each other by a pitch,
- wherein substantially all of a first surface of the device layer opposite the piezoelectric layer is used for mounting the resonator body to adjacent a carrier that is separate from the resonator body;
- and
- wherein the resonator body is configured to resonate in composite mode resonance, the composite mode resonance being a combination of thickness mode resonance defined by the thickness and lateral mode resonance defined by the pitch.
5 more elements
Dependencies are inferred from the claim text.