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US 11,121,691 B2Granted
Resonator structure encapsulation
AssigneeIntel Corporation
InventorsKevin Lin, Kimin Jun, Edris Mohammed
Life of this patent
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Abstract
The RF filters used in conventional mobile devices often include resonator structures, which often require free-standing air-gap structure to prevent mechanical vibrations of the resonator from being damped by a bulk material. A method for fabricating a resonator structure comprises depositing a non-conformal thin-film to the resonator structure to seal air gap cavities in the resonator structure.
Claims20
A method comprising;
- fabricating a resonator structure comprising a resonator and a first air gap cavity and a second air gap cavity, the first air gap cavity vertically over a location adjacent to a first side of the resonator, and the second air gap cavity vertically over a location adjacent to a second side of the resonator, the second side opposite the first side;
- and
- depositing a non-conformal thin-film over the resonator structure to seal the first air gap cavity and the second air gap cavity in the resonator structure.
An integrated circuit (IC) comprising a resonator structure, the resonator structure including:
- a resonator having a first side and a second side, the second side opposite the first side;
- a first air gap cavity vertically over a location adjacent to the first side of the resonator;
- a second air gap cavity vertically over a location adjacent to the second side of the resonator;
- and
- a non-conformal thin-film sealing the first air gap cavity and the second air gap cavity.
2 more elements
A resonator structure, comprising:
- a resonator having a first side and a second side, the second side opposite the first side;
- a first air gap cavity vertically over a location adjacent to the first side of the resonator;
- a second air gap cavity vertically over a location adjacent to the second side of the resonator;
- and
- a non-conformal thin-film sealing the first air gap cavity and the second air gap cavity.
2 more elements
Dependencies are inferred from the claim text.