Electrostatic workpiece-holding method and electrostatic workpiece-holding system

An electrostatic workpiece-holding system comprising an electrostatic attracting part formed of one or more first electrodes capable of applying a positive voltage, one or more second electrodes capable of applying a negative voltage, and a dielectric covering these first and second electrodes, a power supply part capable of applying a positive voltage to the first electrode(s) and applying a negative voltage to the second voltage(s), a static eliminating part eliminating charges on a surface of the electrostatic attracting part, a workpiece setting part capable of abutting a workpiece against the surface of the electrostatic attracting part and taking out the workpiece from the surface of the electrostatic attracting part, and a control part controlling the workpiece setting part, the static eliminating part, and the power supply part, wherein

• the control part comprises
• an initializing part turning on the power supply part;
• a static elimination driving part driving the static eliminating part after the actuation of the initializing part;
• a workpiece abutting part driving the workpiece setting part to abut the workpiece against the surface of the electrostatic attracting part after the actuation of the static elimination driving part;
• a workpiece attracting part turning off the power supply part after the actuation of the workpiece abutting part;
• and
• a workpiece releasing part turning on the power supply part and driving the workpiece setting part to take out the workpiece from the electrostatic attracting part after the actuation of the workpiece attracting part.

A workpiece-holding device, comprising:

• an electrostatic attracting part attracting a workpiece on a surface thereof, and including a first electrode, a second electrode, and a dielectric covering the first electrode and the second electrode, and
• a static eliminator for ionizing a gas around the electrostatic attracting part to thereby eliminate charges on the surface of the electrostatic attracting part,
• wherein the first electrode and the second electrode are flat plate-shaped electrodes juxtaposed so as to adjoin each other at a predetermined interval,
• the surface of the electrostatic attracting part above the first electrode is negatively charged and the surface of the electrostatic attracting part above the second electrode is positively charged with potentials of the first electrode and the second electrode maintained at 0 volts, and after the charges on the surface of the electrostatic attracting part is eliminated, a positive charge is charged on the workpiece above the first electrode and a negative charge is charged on the workpiece above the second electrode, whereby the workpiece is attracted to the electrostatic attracting part in an electrostatic induction state in which an inside of the workpiece has an electric field of zero.

A workpiece-holding device, comprising:

• an electrostatic attracting part attracting a workpiece to a surface of the electrostatic attracting part, and including a first electrode, a second electrode, and a dielectric covering the first electrode and the second electrode, and
• a static eliminator for ionizing a gas around the electrostatic attracting part to thereby eliminate charges on the surface of the electrostatic attracting part,
• wherein the first electrode and the second electrode are comb-shaped electrodes arranged so as to mesh with each other at a predetermined interval,
• the surface of the electrostatic attracting part above each tooth part of the first electrode is positively charged and the surface of the electrostatic attracting part above each tooth part of the second electrode is negatively charged with potentials of the first electrode and the second electrode maintained at 0 volts, and after the charges on the surface of the electrostatic attracting part is eliminated, a negative charge is charged on the workpiece above the each tooth part of the first electrode and a positive charge is charged on the workpiece above the each tooth part of the second electrode, whereby the workpiece is attracted to the electrostatic attracting part with an inside of the workpiece in a dielectric polarization state.