Diaphragm structure and method of manufacturing the same
AssigneeNational Taiwan University of Science and Technology
InventorsJinn P. Chu, Chia-Chi Yu, Bo-Zhang Lai, Chun-Tao Chen
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Abstract
A diaphragm structure is used for an audio signal output device. The diaphragm structure includes a film substrate, a polymer fiber structure and a thin film metallic glass. The film substrate includes a first surface and a second surface opposite to the first surface. The polymer fiber structure is combined with the first surface of the film substrate. The thin film metallic glass is formed on at least a part of the second surface of the film substrate.
Claims13
A diaphragm structure for an audio signal output device, the diaphragm structure comprising:
- a film substrate comprising a first surface and a second surface opposite to the first surface;
- a polymer fiber structure combined with the first surface of the film substrate;
- and
- a thin film metallic glass formed on at least a part of the second surface of the film substrate,
- wherein an absorbable energy of the diaphragm structure under stress ranges from 23*10−12 joule to 44*10−12 joule.
A method of manufacturing a diaphragm structure, comprising:
- providing a film substrate comprising a first surface and a second surface opposite to the first surface;
- combining a polymer fiber structure with the first surface of the film substrate;
- and
- sputtering a metallic glass target on at least a part of the second surface of the film substrate to form a thin film metallic glass,
- wherein the thin film metallic glass comprises an iron-based metallic glass material, a zirconium-based metallic glass material or a copper-based metallic glass material,
- wherein the iron-based metallic glass material comprises a FeaTibCocNidBeNbf alloy, wherein a is 65±10 at %, b is 13±5 at %, c is 8±5 at %, d is 7±5 at %, e is 6±5 at % and f is 1±5 at %, and wherein a, b, c, d, e and f represent integers greater than or equal to 1 and a+b+c+d+e+f=100.
Dependencies are inferred from the claim text.