Light-emitting diode, array substrate, and method of making the same

A method of manufacturing a light-emitting diode in an array substrate for a display panel, the method comprising:

• forming a first electrode;
• forming a light-emitting layer on the first electrode;
• forming a second electrode on a side of the light-emitting layer distal to the first electrode;
• forming a substantially transparent protective layer on a side of the second electrode distal to the light-emitting layer;
• and
• forming a substantially transparent conductive layer on a side of the substantially transparent protective layer distal to the second electrode, wherein the substantially transparent conductive layer and the second electrode are formed to be electrically connected to each other;
• wherein the forming a substantially transparent conductive layer comprises sputtering a metal oxide material in multiple sublayers on a side of the substantially transparent protective layer distal to the second electrode;
• wherein the sputtering the metal oxide material comprises sputtering the metal oxide material at a first deposition rate and a first sputtering power thereby forming a first sublayer and sputtering the metal oxide material at a second deposition rate and a second sputtering power thereby forming a second sublayer, the second deposition rate being greater than the first deposition rate, the second sputtering power being greater than the first sputtering power;
• wherein the first sublayer is formed to have a highest transmissivity and a lowest stress among all sublayers of the multi-layer film.